A method of simultaneously imaging and measuring elements at the submicron level. Nuclear microscopy uses a focused high-energy ion beam of PROTONS and ALPHA PARTICLES (a nuclear microprobe) to interact with the sample. The resulting emitted radiations are analyzed by a group of techniques simultaneously: PARTICLE INDUCED X RAY EMISSION SPECTROMETRY for minor and trace element identification; Rutherford Backscattering Spectroscopy to assess sample thickness and bulk elements such as carbon, hydrogen, oxygen, and nitrogen; and Scanning Transmission Ion Microscopy to assess sample structure and density.