Id http://purl.bioontology.org/ontology/CSP/0632-2163
http://purl.bioontology.org/ontology/CSP/0632-2163
Preferred Name

electron probe spectrometry

Definitions
identification and measurement of concentration of elements based on the fact that primary-emission x-rays emitted by an element excited by an electron beam have a wavelength characteristic of that element and an intensity related to its concentration; may be performed by an electron probe microanalyzer, an electron microscope microanalyzer, or by an electron microscope, or scanning electron microscope, fitted with an x-ray spectrometer.
Synonyms
electron probe microanalysis
electron probe x-ray microanalysis
Type http://www.w3.org/2002/07/owl#Class
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